Improved characteristics of InGaN multiple-quantum-well laser diodes grown on laterally epitaxially overgrown GaN on sapphire
InGaN multiple-quantum-well laser diodes have been fabricated on fully coalesced laterally epitaxially overgrown (LEO) GaN on sapphire. The laterally overgrown “wing” regions as well as the coalescence fronts contained few or no threading dislocations. Laser diodes fabricated on these low-dislocation-density regions showed a reduction in threshold current density from 10 to 4.8 kA/cm2compared to those on conventional planar GaN on sapphire. The internal quantum efficiency also improved from 3% for laser diodes on conventional GaN on sapphire to 22% for laser diodes on LEO GaN on sapphire.