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Epitaxial growth of homogeneous single-crystalline AlN films on single-crystalline Cu substratesHighlights
Single-crystalline AlN films have been grown on single-crystalline Cu substrates.
High thickness homogeneity AlN films have been achieved.
Crack free AlN films have been grown single-crystalline Cu substrates.
The as-grown ∼321 nm thick AlN films are only with a compressive strain of 0.48%.
Source:Sciencedirect