We offer SiC Boule(Ingot) with 2”, 4” and 6”size, please see below specification of SiC Boule(Ingot):
6 inch SiC Boule(Ingot)Specification | ||
Grade | Production Grade | Research Grade |
Polytype | 4H | |
Diameter | 150.0mm±0.5mm | |
Type | N-type | |
Orientation | C(0001)4.0°±0.2° | |
Resistivity | 0.015~0.028 ohm.cm | |
MicroPipe Density | <2cm-2 | <10cm-2 |
Primary Flat Orientation | {10-10} ±5.0° | |
Primary Flat Length | 47.5mm±2.5mm | |
Edge cracks by high intensity light | ≤1mm in radial | ≤3mm in radial |
Hex Plates by high intensity light | Size<1mm, Cumulative area<1% | Cumulative area<5% |
Polytype Areas by high intensity light | None | ≤5% area |
4inch SiC Boule(Ingot) Specification | ||
Grade | Production Grade | Research Grade |
Polytype | 4H | |
Diameter | 100.0mm±0.5mm | |
Carrier Type | N-type | |
Orientation | C(0001)4.0°±0.2° | |
Resistivity | 0.015~0.028 ohm.cm | |
MicroPipe Density | <2cm-2 | <10cm-2 |
Primary Flat Orientation | {10-10} ±5.0° | |
Primary Flat Length | 32.5mm±2.0mm | |
Secondary Flat Orientation | Si-face:90° cw. from primary flat ± 5° | |
C-face:90° cw. from primary flat ± 5° | ||
Secondary Flat Length | 18.0mm±2.0 mm | |
Edge cracks by high intensity light | ≤1mm in radial | ≤3mm in radial |
Hex Plates by high intensity light | Size<1mm, Cumulative area<1% | Cumulative area<5% |
Polytype Areas by high intensity light | None | ≤5% area |
For more information, please visit our website: http://www.qualitymaterial.net,send us email at sales@powerwaywafer.com or powerwaymaterial@gmail.com